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PVD system 10-950

The PVD system 10-950 is a large system designed for special tools, e.g. broaching tools. A chamber height of 1.50 m and a volume of 950 liters characterize the largest system in our series to date.

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Intro picture PVD system 10-950

PVD system 10-950

Like all GPA-PVD systems, it is built according to a concept that guarantees robustness and a long service life.

  • Double-walled octagonal coating chambers made of stainless steel, fully cooled, for maximum dimensional stability and appearance even after years of use
  • The entire system is mounted on a compact stainless steel frame to save space
  • Plug-in system (central transfer point for all connections such as electricity, compressed air, cooling unit, gases) enables commissioning within one day
  • Unloading and loading of complete batches using a loading dolly
  • Check Control: automatic display of maintenance intervals
  • Including proven formulations for all coating systems
  • Own developments can be saved quickly and easily
  • Remote maintenance module optionally via Internet or ISDN
  • Operating personnel can be trained on identical systems before commissioning
PVD system 10-950

Specifications PVD system 10-950

Coating chamber
Dimensions Ø 900 x 1,500 mm Material austenitic steel double-walled; fully cooled or bakeable
Rotary drive
Infinitely variable speed control clockwise/anticlockwise rotation Batch weight up to 500 kg
Vaporizer
10 arc spot evaporators in 2 rows of 5; alternatively 12 arc spot evaporators in 3 rows of 4 active cathode area 50 cm2
Evaporator power supplies
10 alt. 15 pieces max. 100 A
High-voltage supply
0 - 1,000 V unipolar pulsed 0 - 50 ADC 0 - 120 APulse fast arc switch-off
Substrate heating
4 heaters of 15 kW each
Substrate temperature measurement
Pyrometer 150 - 550 °C
Process gas control
4 mass flow controllers (argon, hydrogen, nitrogen, carbon carrier gas)
Backing pumping unit
Rotary vane/rotary pump combination Suction capacity S 730 m3 / h
High vacuum pump
Cryopump suction capacity H2O 18,000 ; Ar 3,700 ; N2 5,000; H2 5,500 L/sec.
High vacuum valve
Stepper motor-controlled control valve DN 400
Vacuum measurement
Pirani gas type independent measuring device
Process control
Fully automatic, industry PC parameters, ramps etc. freely programmable
Accessories (optional)
Cold/hot water supply Process gas supply Triple planetary rotating substrate holder

Individual coating services: Let us advise you!

Do you already know what you need? Or do you need more information? We have been developing PVD coatings for our customers for over 30 years and are sure to have the right coating solution for your individual application. We also guarantee a fast delivery time! Put your trust in our experience!

02171 – 70860
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