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PVD system 9-500

With a chamber volume of 500 liters and 9 arc evaporators, the fully automatic PVD system 9-500 covers more than 95 % of all possible substrate dimensions and can therefore be used universally. The large number of evaporators in relation to the chamber volume enables fast coating cycles.

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Intro picture PVD system 9-500

PVD system 9-500

Like all GPA-PVD systems, it is built according to a concept that guarantees robustness and a long service life.

  • Double-walled octagonal coating chambers made of stainless steel, fully cooled, for maximum dimensional stability and appearance even after years of use
  • The entire system is mounted on a compact stainless steel frame to save space
  • Plug-in system (central transfer point for all connections such as electricity, compressed air, cooling unit, gases) enables commissioning within one day
  • Unloading and loading of complete batches using a loading dolly
  • Check Control: automatic display of maintenance intervals
  • Including proven formulations for all coating systems
  • Own developments can be saved quickly and easily
  • Remote maintenance module optionally via Internet or ISDN
  • Operating personnel can be trained on identical systems before commissioning
Systems PVD system 9-500

Specifications PVD system 9-500

Coating chamber
Dimensions Ø 800 x 1,000 mm Material austenitic steel double-walled; fully cooled or bakeable
Rotary drive
Infinitely variable speed control clockwise/anticlockwise rotation Batch weight up to 500 kg
Vaporizer
6 arc spot evaporators in 3 rows of 2 active cathodes 50 cm2 each
Evaporator power supplies
9 pieces max. 120 A
High-voltage supply
0 - 1,000 V 0 - 30 ADC 0 - 75 APuls fast arc switch-off
Substrate heating
2 heaters, 13.5 kW each
Substrate temperature measurement
Pyrometer 150 - 550 °C
Process gas control
4 mass flow controllers (argon, hydrogen, nitrogen, carbon carrier gas)
Backing pumping unit
Rotary vane/rotary pump combination Suction capacity S 360 m3 / h
High vacuum pump
Turbomolecular pump Suction capacity S = 1,550 L /sec.
High vacuum valve
Stepper motor-controlled control valve DN 250
Vacuum measurement
Pirani gas type independent measuring device
Process control
Fully automatic, industrial PC Parameters, ramps etc. freely programmable
Accessories (optional)
Cold/hot water supply Process gas supply 3-fold planetary rotating substrate holders shuttle tables

Individual coating services: Let us advise you!

Do you already know what you need? Or do you need more information? We have been developing PVD coatings for our customers for over 30 years and are sure to have the right coating solution for your individual application. We also guarantee a fast delivery time! Put your trust in our experience!

02171 – 70860
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