Systems
PVD system 6-350

The fully automatic PVD coating system 6-350 is the smallest system in our standard series. It has a chamber volume of 350 liters and 6 arc evaporators. The large number of evaporators in relation to the chamber volume enables fast coating cycles.

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PVD system 6-350

Like all GPA-PVD systems, it is built according to a concept that guarantees robustness and a long service life.

  • Double-walled octagonal coating chambers made of stainless steel, fully cooled, for maximum dimensional stability and appearance even after years of use
  • The entire system is mounted on a compact stainless steel frame to save space
  • Plug-in system (central transfer point for all connections such as electricity, compressed air, cooling unit, gases) enables commissioning within one day
  • Unloading and loading of complete batches using a loading dolly
  • Check Control: automatic display of maintenance intervals
  • Including proven formulations for all coating systems
  • Own developments can be saved quickly and easily
  • Remote maintenance module optionally via Internet or ISDN
  • Training of operating personnel possible before commissioning
Anlagen PVD-Anlage 6-350

Specifications PVD system 6-350

Coating chamber
Dimensions Ø 700 x 800 mm Material austenitic steel double-walled; fully cooled or bakeable
Rotary drive
Infinitely variable speed control Clockwise/anticlockwise rotation Batch weight up to 500 kg
Vaporiser
6 arc-spot evaporators in 3 rows of 2 active cathodes 50 cm2 each
Vaporiser power supplies
6 pieces max. 100 A
High-voltage supply
0 - 1,000 V pulsed 0 - 10 ADC 0 - 20 APulse fast arc switch-off
Substrate heating
4 heaters 6 kW each
Substrate temperature measurement
Pyrometer 150 – 550 °C
Process gas control
4 mass flow controllers (Ar, H2, N2, carbon carrier gas)
Backing pumping unit
Rotary vane/rotary pump combination Suction capacity S 340 m3 / h
High vacuum pump
Turbomolecular pump Suction capacity S = 1,550 L /sec.
High vacuum valve
Stepper motor-controlled control valve DN 200
Vacuum measurement
Pirani gas type independent measuring device
Process control
Fully automatic, industry PC parameters, ramps etc. freely programmable
Accessories (optional)
Cold/hot water supply Process gas supply Triple planetary rotating substrate holder

Individual coating services: Let us advise you!

Do you already know what you need? Or do you need more information? We have been developing PVD coatings for our customers for over 30 years and are sure to have the right coating solution for your individual application. We also guarantee a fast delivery time! Put your trust in our experience!

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